產品介紹
>半導體自動化 >細線路修補
Laser Cutting and Patterning
各種膜薄材料雷射切割(移除)及圖案化修補
搭配EFEM及非接觸式對位系統可精準傳輸複合材質、玻璃及金屬載體等各式材料的面板及晶圓尺寸規格
搭載AOI及3D量測達到快速自動化且精準缺陷檢測
雷射搭載同軸影像,達到高精度雷射修補、降低基板損傷、即時圖案化雷射加工
General
Dimension/Weight (Wafer Form):(W)1700 x (L)2500 x (H)2240 mm / 4600kg
Dimension/Welght (Panel Form):(W)3500 x (L)3700 x (H)2240 mm / 8500kg
Wafer/Panel Transfer Size:300x300 ~ 600x600 mm 
Stage accuracy :≦ 2μm
Stage repeatability:≦ 1μm
Stage max velocity:800mm/s


Process Capability
Laser type:Nanosecond laser
Process material*:Metal film / ITO / Photoresist / Polymer / Compound
Line/Space (L/S)*:> 2μm/ 2μm


Inspection Capability
Inspection Item:Aperture, Residual, Displacement, Depth
Inspection size:≧ 5μm
3D Depth resolution :0.3 μm
3D Width resolution :0.2 μm


Depend on the characteristic of material and substrate.
Contrel Technology Co., Ltd. All Rights Reserved.
東捷關係企業
Contrel Technology Co., Ltd. All Rights Reserved.
東捷關係企業
友情链接:欧美人曽交流  免费在线观看的黄片  野狼社区  第一福利视频草莓  超碰久久人人摸人人搞  老鸭窝在线视频  飘花电影网  宅男影院  每日更新在线观看av  a片毛片免费观看  日日操  夜夜骑综合  大香蕉网站  欧美av  免费在线观看的黄片  台湾妹中文娱乐网  免费在线观看的黄片  香港经典三级  韩国三级-香港三级-日本三级-三级片成人影片网站  快看  免费在线观看的黄片  米奇网站  桃花色综合影院  欧美A片  亚洲电影男人天堂  俺去也老色哥  大香蕉  久久99re热在线播放  蝌蚪窝一个释放的网站  韩国三级片大全在线观看