產品介紹
>半導體自動化 >細線路修補
PR Ink Repair
●光阻缺損及殘留圖案化修補
●搭配EFEM及非接觸式對位系統可精準傳輸複合材質、玻璃及金屬載體等各式材料的面板及晶圓尺寸規格
●搭載AOI及3D量測達到快速自動化且精準缺陷檢測
●雷射搭載同軸影像,達到高精度雷射修補、降低基板損傷、即時圖案化雷射加工
●General
Dimension/Weight (Wafer Form):(W)1700 x (L)2500 x (H)2240 mm / 4600kg
Dimension/Welght (Panel Form):(W)3500 x (L)3700 x (H)2240 mm / 8500kg
Wafer/Panel Transfer Size:300x300 ~ 600x600 mm 
Stage accuracy :≦ 2μm
Stage repeatability:≦ 1μm
Stage max velocity:800mm/s

●Process Capability
PR ink pattern design:Dot, Line, Circle
Camera:Real-time observation camera
Laser type:Nanosecond laser
Laser process material:Photoresist / Metal / ITO
Line/Space (L/S)*:>2μm/2μm

●Inspection Capability
Inspection Item:Aperture, Residual, Displacement, Depth
Inspection size:≧ 5μm
3D Depth resolution :0.3 μm
3D Width resolution :0.2 μm


●Depend on the characteristic of material and substrate.
Contrel Technology Co., Ltd. All Rights Reserved.
東捷關係企業
Contrel Technology Co., Ltd. All Rights Reserved.
東捷關係企業
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